JPS6117151Y2 - - Google Patents

Info

Publication number
JPS6117151Y2
JPS6117151Y2 JP7145681U JP7145681U JPS6117151Y2 JP S6117151 Y2 JPS6117151 Y2 JP S6117151Y2 JP 7145681 U JP7145681 U JP 7145681U JP 7145681 U JP7145681 U JP 7145681U JP S6117151 Y2 JPS6117151 Y2 JP S6117151Y2
Authority
JP
Japan
Prior art keywords
vibration
floor
plate
building
rigid plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP7145681U
Other languages
English (en)
Japanese (ja)
Other versions
JPS57183336U (en]
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7145681U priority Critical patent/JPS6117151Y2/ja
Publication of JPS57183336U publication Critical patent/JPS57183336U/ja
Application granted granted Critical
Publication of JPS6117151Y2 publication Critical patent/JPS6117151Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Floor Finish (AREA)
  • Building Environments (AREA)
JP7145681U 1981-05-19 1981-05-19 Expired JPS6117151Y2 (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7145681U JPS6117151Y2 (en]) 1981-05-19 1981-05-19

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7145681U JPS6117151Y2 (en]) 1981-05-19 1981-05-19

Publications (2)

Publication Number Publication Date
JPS57183336U JPS57183336U (en]) 1982-11-20
JPS6117151Y2 true JPS6117151Y2 (en]) 1986-05-26

Family

ID=29867249

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7145681U Expired JPS6117151Y2 (en]) 1981-05-19 1981-05-19

Country Status (1)

Country Link
JP (1) JPS6117151Y2 (en])

Cited By (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6926012B2 (en) 1999-11-02 2005-08-09 Tokyo Electron Limited Method for supercritical processing of multiple workpieces
US7060422B2 (en) 1999-11-02 2006-06-13 Tokyo Electron Limited Method of supercritical processing of a workpiece
US7140393B2 (en) 2004-12-22 2006-11-28 Tokyo Electron Limited Non-contact shuttle valve for flow diversion in high pressure systems
US7186093B2 (en) 2004-10-05 2007-03-06 Tokyo Electron Limited Method and apparatus for cooling motor bearings of a high pressure pump
US7250374B2 (en) 2004-06-30 2007-07-31 Tokyo Electron Limited System and method for processing a substrate using supercritical carbon dioxide processing
US7291565B2 (en) 2005-02-15 2007-11-06 Tokyo Electron Limited Method and system for treating a substrate with a high pressure fluid using fluorosilicic acid
US7307019B2 (en) 2004-09-29 2007-12-11 Tokyo Electron Limited Method for supercritical carbon dioxide processing of fluoro-carbon films
US7380984B2 (en) 2005-03-28 2008-06-03 Tokyo Electron Limited Process flow thermocouple
US7434590B2 (en) 2004-12-22 2008-10-14 Tokyo Electron Limited Method and apparatus for clamping a substrate in a high pressure processing system
US7491036B2 (en) 2004-11-12 2009-02-17 Tokyo Electron Limited Method and system for cooling a pump
US7494107B2 (en) 2005-03-30 2009-02-24 Supercritical Systems, Inc. Gate valve for plus-atmospheric pressure semiconductor process vessels
US7524383B2 (en) 2005-05-25 2009-04-28 Tokyo Electron Limited Method and system for passivating a processing chamber

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2527552Y2 (ja) * 1990-04-09 1997-03-05 株式会社竹中工務店 フロアパネル端部の支持構造
JP5011333B2 (ja) * 2009-03-23 2012-08-29 ドーエイ外装有限会社 天井用目地装置
JP6570453B2 (ja) * 2016-01-29 2019-09-04 理研軽金属工業株式会社 エキスパンションジョイントカバー装置

Cited By (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6926012B2 (en) 1999-11-02 2005-08-09 Tokyo Electron Limited Method for supercritical processing of multiple workpieces
US7060422B2 (en) 1999-11-02 2006-06-13 Tokyo Electron Limited Method of supercritical processing of a workpiece
US7250374B2 (en) 2004-06-30 2007-07-31 Tokyo Electron Limited System and method for processing a substrate using supercritical carbon dioxide processing
US7307019B2 (en) 2004-09-29 2007-12-11 Tokyo Electron Limited Method for supercritical carbon dioxide processing of fluoro-carbon films
US7186093B2 (en) 2004-10-05 2007-03-06 Tokyo Electron Limited Method and apparatus for cooling motor bearings of a high pressure pump
US7491036B2 (en) 2004-11-12 2009-02-17 Tokyo Electron Limited Method and system for cooling a pump
US7140393B2 (en) 2004-12-22 2006-11-28 Tokyo Electron Limited Non-contact shuttle valve for flow diversion in high pressure systems
US7434590B2 (en) 2004-12-22 2008-10-14 Tokyo Electron Limited Method and apparatus for clamping a substrate in a high pressure processing system
US7291565B2 (en) 2005-02-15 2007-11-06 Tokyo Electron Limited Method and system for treating a substrate with a high pressure fluid using fluorosilicic acid
US7380984B2 (en) 2005-03-28 2008-06-03 Tokyo Electron Limited Process flow thermocouple
US7494107B2 (en) 2005-03-30 2009-02-24 Supercritical Systems, Inc. Gate valve for plus-atmospheric pressure semiconductor process vessels
US7524383B2 (en) 2005-05-25 2009-04-28 Tokyo Electron Limited Method and system for passivating a processing chamber

Also Published As

Publication number Publication date
JPS57183336U (en]) 1982-11-20

Similar Documents

Publication Publication Date Title
JPS6117151Y2 (en])
JP2001074591A (ja) 遠心振動模型実験用せん断土槽
JP2586794Y2 (ja) 構造物用免震支持装置
EP0694660B1 (en) Vertical vibration control device
JP3942742B2 (ja) 床用目地カバー装置
JP2021059913A (ja) 目地プレートの支持構造及び床用目地装置
JP2004092019A (ja) 床用目地カバー装置
JP2018009341A (ja) 壁面用目地装置
JPH0716724Y2 (ja) 橋桁の免震支承装置
JPH0139351Y2 (en])
JPH0528273Y2 (en])
JP2595431Y2 (ja) 床用目地カバー装置
JP2587927Y2 (ja) 免震床構造
JP2020090872A (ja) 目地カバー装置
JPH0448286Y2 (en])
JP6876538B2 (ja) 建具枠取付構造
JPH076336Y2 (ja) 免震床周辺部の変位吸収装置
JPH0415877Y2 (en])
JP2023149723A (ja) 床用目地装置
JP3955601B2 (ja) 建築物及び建築物の施工方法
JPS6232223Y2 (en])
JPH07310425A (ja) ３次元免震床
JP2525294Y2 (ja) 開閉式屋根のスライド支持装置
JPH0447005U (en])
JPH076338Y2 (ja) 免震床周辺部の変位吸収装置